Chamber Atmosphere Furnace is a state-of-the-art equipment designed to optimize the heat treatment environment. Through a fine pre-evacuation process, the oxygen content in the furnace chamber is reduced to the minimum, and then inert gases such as nitrogen, argon, etc. are filled in, so as to create an ideal atmosphere to protect the environment.
Chamber atmosphere furnaces have been widely used in materials laboratories and in the field of small batch production of semiconductors, silicon nitride and other products.
1、Wide range of working temperature, covering from room temperature to 1700℃, to meet the needs of heat treatment of different materials.
2、The furnace chamber is made of alumina polycrystalline fiber material, which ensures the uniform distribution of temperature inside the furnace, and at the same time avoids any possible contamination.
3、The furnace body has a compact structure, the shell is made of double-layer thickened steel plate, and the ultimate vacuum can reach -0.1Mpa, which ensures the purity of the atmosphere inside the furnace.
4、The top, left, right and back of the furnace chamber are made of 12mm solid square steel as reinforcement, which enables the furnace body to maintain a stable shape and not easy to be deformed during the vacuuming process. The maximum vacuum degree can reach -0.08MPa, which further enhances the precision of atmosphere regulation.
5, the chamber atmosphere furnace adopts the industrial accuracy of 0.2 level of intelligent instrumentation, combined with PID regulation technology, the realization of the 50-segment programming function, providing users with more flexible and accurate temperature control options.
6, the sealing performance of the furnace door is also carefully designed, through the four handwheels to lock the door, with the silicone ring sealing, to ensure that the atmosphere inside the furnace is completely closed and stable.
Door firebricks (except 1200 model)
High temperature gloves
Crucible tongs
Instruction manual
Two heat elements (except model 1200)
Optional accessories:
Direct-connected vacuum pump
Touch screen/computer connection software
Furnace crucible (multi-layer kiln furniture)
Heating elements (silicon molybdenum rods, silicon carbon rods)
Gas circuit system (float/proton flow meter, 2-way/3-way gas)
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| Max.
Temperature |
1200C
(< 3 hours) |
| Continuous
Work Temp. |
1100C |
| Chamber Size | 300x300x400mm |
| Max.
Heating Rate |
30C /min |
| Temperature Accuracy | +/- 1C |
| Temperature
Controller |
–PID automatic control and auto-tune function
–30 programmable segments for precise control –Built in protection for over-heated and broken Thermal couple –Larger digital control panel (48 x 96 mm) for easy operation. |
| Gas Flow Control and Vacuum Valve | –Two larger flowmeters are installed in front panel of furnace to allow two types of gas mixing and flowing at same time
–One vacuum port is installed in left of furnace to remove air by vacuum pump before filling gas |
| Heating Element | Ni-Cr Resistance Wire |
| Thermal Couple | K type Thermocouples with Alumina Protection Tube |
| Power | 6KW |
| Voltage | AC 110V or AC 220V 50/60 |
| Warranty | 1 year limited warranty
(Consumable parts such as thermocouple and heating elements are not covered by the warranty.) |
| Certificate | CE certified |
| 1200C
Atmosphere Furnace
|
150x150x150mm (6″x6″x6″) | 1200C |
| 150x150x200mm (6″x6″x8″) | ||
| 200x200x200mm (8″x8″x8″) | ||
| 200x200x300mm (8″x8″x12″) | ||
| 250x250x300mm (10″x10″x12″) | ||
| 300x300x400mm (12″x12″x16″) | ||
| 350x350x400mm (14″x14″x16″) | ||
| 400x400x400mm (16″x16″x16″) | ||
| 500x500x500mm (20″x20″x20″) |
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